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Controlling Anti-Penetration Performance by Post-Grafting of Fluorinated Alkyl Chains onto Polystyrene- block -poly(vinyl methyl siloxane)

https://doi.org/10.1021/acsami.4c01905

Zhang, Zhenglin; Chaudhuri, Krishnaroop; Kaefer, Florian; Malanoski, Anthony P; Page, Kirt A; Smieska, Louisa M; Pham, Jonathan T; Ober, Christopher K (April 2024, ACS Applied Materials & Interfaces)

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Photoresist Design to Address Stochastics Issues in EUV Resists

https://doi.org/10.2494/photopolymer.36.61

Kaefer, Florian; Yuan, Chenyun; Adams, Cameron; Segalman, Rachel; Ober, Christopher K (January 2023, Journal of Photopolymer Science and Technology)

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